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Sputtering of Ag (111) nanotwinned films on Si (100) wafers..:
Wu, Po-Ching
;
Lai, Yu-Chang
;
Lee, Pei-Ing
...
Journal of Materials Science: Materials in Electronics. 32 (2021) 6 - p. 7319-7329 , 2021
Link:
https://doi.org/10.1007/s10854-021-05442-3
RT Journal T1 <Title>Sputtering of Ag (111) nanotwinned films on Si (100) wafers for backside metallization of power devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s10854-021-05442-3&Exemplar=1&LAN=DE A1 Wu, Po-Ching A1 Lai, Yu-Chang A1 Lee, Pei-Ing A1 Chiang, Meng-Ting A1 Chou, Justin A1 Chuang, Tung-Han PB Springer Science and Business Media LLC YR 2021 SN 0957-4522 SN 1573-482X JF Journal of Materials Science: Materials in Electronics VO 32 IS 6 SP 7319 OP 7329 LK http://dx.doi.org/https://doi.org/10.1007/s10854-021-05442-3 DO https://doi.org/10.1007/s10854-021-05442-3 SF ELIB - SuUB Bremen
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