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High-quality AlN growth: a detailed study on ammonia flow:
Yolcu, Gamze
;
Koçak, Merve Nur
;
Ünal, Dudu Hatice
...
Journal of Materials Science: Materials in Electronics. 34 (2023) 4 - p. , 2023
Link:
https://doi.org/10.1007/s10854-022-09556-0
RT Journal T1 <Title>High-quality AlN growth: a detailed study on ammonia flow</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s10854-022-09556-0&Exemplar=1&LAN=DE A1 Yolcu, Gamze A1 Koçak, Merve Nur A1 Ünal, Dudu Hatice A1 Altuntas, Ismail A1 Horoz, Sabit A1 Demir, Ilkay PB Springer Science and Business Media LLC YR 2023 SN 0957-4522 SN 1573-482X JF Journal of Materials Science: Materials in Electronics VO 34 IS 4 LK http://dx.doi.org/https://doi.org/10.1007/s10854-022-09556-0 DO https://doi.org/10.1007/s10854-022-09556-0 SF ELIB - SuUB Bremen
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