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1 Ergebnisse
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Impact of SiO2 hardmask on the DC and RF characteristics of..:
Zhou, Fugui
;
Feng, Ruize
;
Cao, Shurui
...
Journal of Materials Science: Materials in Electronics. 34 (2023) 29 - p. , 2023
Link:
https://doi.org/10.1007/s10854-023-11404-8
RT Journal T1 <Title>Impact of SiO2 hardmask on the DC and RF characteristics of InP HEMTs</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s10854-023-11404-8&Exemplar=1&LAN=DE A1 Zhou, Fugui A1 Feng, Ruize A1 Cao, Shurui A1 Feng, Zhiyu A1 Liu, Tong A1 Su, Yongbo A1 Shi, Jingyuan A1 Din, Wuchang A1 Jin, Zhi PB Springer Science and Business Media LLC YR 2023 SN 0957-4522 SN 1573-482X JF Journal of Materials Science: Materials in Electronics VO 34 IS 29 LK http://dx.doi.org/https://doi.org/10.1007/s10854-023-11404-8 DO https://doi.org/10.1007/s10854-023-11404-8 SF ELIB - SuUB Bremen
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