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RF magnetron sputtering of ZnO and Al-doped ZnO films from ..:

Bouznit, Y. ; Beggah, Y. ; Djessas, K.
Journal of Sol-Gel Science and Technology.  61 (2011)  2 - p. 449-454 , 2011
Link: https://doi.org/10.1007/s10971-011-2645-y