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A Thin-Film Capacitance Pressure Sensor:
Kazaryan, A. A.
;
Strel'tsov, E. V.
Measurement Techniques. 57 (2015) 12 - p. 1403-1410 , 2015
Link:
https://doi.org/10.1007/s11018-015-0641-2
RT Journal T1 <Title>A Thin-Film Capacitance Pressure Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s11018-015-0641-2&Exemplar=1&LAN=DE A1 Kazaryan, A. A. A1 Strel'tsov, E. V. PB Springer Science and Business Media LLC YR 2015 SN 0543-1972 SN 1573-8906 JF Measurement Techniques VO 57 IS 12 SP 1403 OP 1410 LK http://dx.doi.org/https://doi.org/10.1007/s11018-015-0641-2 DO https://doi.org/10.1007/s11018-015-0641-2 SF ELIB - SuUB Bremen
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