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Pulsed Aerosol-Assisted Low-Pressure Plasma for Thin-Film D..:

Carnide, G. ; Simonnet, C. ; Parmar, D....
Plasma Chemistry and Plasma Processing.  44 (2024)  3 - p. 1343-1356 , 2024
Link: https://doi.org/10.1007/s11090-024-10455-x