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1 Ergebnisse
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Fast Level-Set-Based Inverse Lithography Algorithm for Proc..:
Geng, Zhen
;
Shi, Zheng
;
Yan, Xiao-Lang
..
Journal of Computer Science and Technology. 30 (2015) 3 - p. 629-638 , 2015
Link:
https://doi.org/10.1007/s11390-015-1549-7
RT Journal T1 <Title>Fast Level-Set-Based Inverse Lithography Algorithm for Process Robustness Improvement and Its Application</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s11390-015-1549-7&Exemplar=1&LAN=DE A1 Geng, Zhen A1 Shi, Zheng A1 Yan, Xiao-Lang A1 Luo, Kai-Sheng A1 Pan, Wei-Wei PB Springer Science and Business Media LLC YR 2015 SN 1000-9000 SN 1860-4749 JF Journal of Computer Science and Technology VO 30 IS 3 SP 629 OP 638 LK http://dx.doi.org/https://doi.org/10.1007/s11390-015-1549-7 DO https://doi.org/10.1007/s11390-015-1549-7 SF ELIB - SuUB Bremen
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