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Removal of Dry-Etch-Induced Surface Layer Damage from p-GaN..:

Meyers, V. ; Rocco, E. ; Hogan, K....
Journal of Electronic Materials.  49 (2020)  6 - p. 3481-3489 , 2020
Link: https://doi.org/10.1007/s11664-020-07986-2