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1 Ergebnisse
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Complex High-κ Oxides for Gate Dielectric Applications:
Ahadi, Kaveh
;
Cadien, Ken
Journal of Electronic Materials. 51 (2022) 9 - p. 5058-5064 , 2022
Link:
https://doi.org/10.1007/s11664-022-09724-2
RT Journal T1 <Title>Complex High-κ Oxides for Gate Dielectric Applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s11664-022-09724-2&Exemplar=1&LAN=DE A1 Ahadi, Kaveh A1 Cadien, Ken PB Springer Science and Business Media LLC YR 2022 SN 0361-5235 SN 1543-186X JF Journal of Electronic Materials VO 51 IS 9 SP 5058 OP 5064 LK http://dx.doi.org/https://doi.org/10.1007/s11664-022-09724-2 DO https://doi.org/10.1007/s11664-022-09724-2 SF ELIB - SuUB Bremen
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