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1 Ergebnisse
1
Ultra-low temperature anodic bonding of silicon and glass b..:
Yao, Fu-rong
;
Pan, Ming-qiang
;
Zhu, Zong-jian
..
Journal of Central South University. 28 (2021) 2 - p. 351-360 , 2021
Link:
https://doi.org/10.1007/s11771-021-4607-z
RT Journal T1
Ultra-low temperature anodic bonding of silicon and glass based on nano-gap dielectric barrier discharge
UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s11771-021-4607-z&Exemplar=1&LAN=DE A1 Yao, Fu-rong A1 Pan, Ming-qiang A1 Zhu, Zong-jian A1 Liu, Ji-zhu A1 Wang, Yang-jun PB Springer Science and Business Media LLC YR 2021 SN 2095-2899 SN 2227-5223 JF Journal of Central South University VO 28 IS 2 SP 351 OP 360 LK http://dx.doi.org/https://doi.org/10.1007/s11771-021-4607-z DO https://doi.org/10.1007/s11771-021-4607-z SF ELIB - SuUB Bremen
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