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1 Ergebnisse
1
Maskless laser direct imaging lithography using a 355-nm UV..:
Ryoo, Kitaek
;
Kim, Minwook
;
Sung, Jinwoo
..
Journal of Mechanical Science and Technology. 29 (2015) 1 - p. 365-370 , 2015
Link:
https://doi.org/10.1007/s12206-014-1243-7
RT Journal T1 <Title>Maskless laser direct imaging lithography using a 355-nm UV light source in manufacturing of flexible fine dies</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s12206-014-1243-7&Exemplar=1&LAN=DE A1 Ryoo, Kitaek A1 Kim, Minwook A1 Sung, Jinwoo A1 Kim, Kwangho A1 Kang, Myungchang PB Springer Science and Business Media LLC YR 2015 SN 1738-494X SN 1976-3824 JF Journal of Mechanical Science and Technology VO 29 IS 1 SP 365 OP 370 LK http://dx.doi.org/https://doi.org/10.1007/s12206-014-1243-7 DO https://doi.org/10.1007/s12206-014-1243-7 SF ELIB - SuUB Bremen
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