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1 Ergebnisse
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Dual servo stage without mechanical coupling for process of..:
Kim, Kihyun
;
Choi, Young-Man
;
Nam, Byoung-Uk
.
International Journal of Precision Engineering and Manufacturing. 13 (2012) 3 - p. 407-412 , 2012
Link:
https://doi.org/10.1007/s12541-012-0052-0
RT Journal T1 <Title>Dual servo stage without mechanical coupling for process of manufacture and inspection of flat panel displays via modular design approach</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s12541-012-0052-0&Exemplar=1&LAN=DE A1 Kim, Kihyun A1 Choi, Young-Man A1 Nam, Byoung-Uk A1 Lee, Moon Gu PB Springer Science and Business Media LLC YR 2012 SN 2234-7593 SN 2005-4602 JF International Journal of Precision Engineering and Manufacturing VO 13 IS 3 SP 407 OP 412 LK http://dx.doi.org/https://doi.org/10.1007/s12541-012-0052-0 DO https://doi.org/10.1007/s12541-012-0052-0 SF ELIB - SuUB Bremen
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