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An Analysis of the Focus Variation Microscope and Its Appli..:

Yuan, Lin ; Guo, Tong ; Qiu, Zhongjun..
International Journal of Precision Engineering and Manufacturing.  21 (2020)  12 - p. 2249-2261 , 2020
Link: https://doi.org/10.1007/s12541-020-00419-4