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Design and Assembly of a Thin-Film-Based Micro Pump for a M..:

Lee, Huseung ; Kwak, Dong-Wook ; Park, Jung-Ho..
International Journal of Precision Engineering and Manufacturing.  21 (2020)  12 - p. 2335-2344 , 2020
Link: https://doi.org/10.1007/s12541-020-00425-6