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Pattern Classification for Small-Sized Defects Using Multi-..:
Byun, Yunseon
;
Baek, Jun-Geol
International Journal of Precision Engineering and Manufacturing. 22 (2021) 10 - p. 1681-1691 , 2021
Link:
https://doi.org/10.1007/s12541-021-00566-2
RT Journal T1 <Title>Pattern Classification for Small-Sized Defects Using Multi-Head CNN in Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s12541-021-00566-2&Exemplar=1&LAN=DE A1 Byun, Yunseon A1 Baek, Jun-Geol PB Springer Science and Business Media LLC YR 2021 SN 2234-7593 SN 2005-4602 JF International Journal of Precision Engineering and Manufacturing VO 22 IS 10 SP 1681 OP 1691 LK http://dx.doi.org/https://doi.org/10.1007/s12541-021-00566-2 DO https://doi.org/10.1007/s12541-021-00566-2 SF ELIB - SuUB Bremen
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