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1 Ergebnisse
1
Design and Positioning Control of a Flexure-Based Nano-posi..:
Zhang, Chi
;
Huang, Xiaolu
;
Yang, Miao
...
International Journal of Precision Engineering and Manufacturing. 23 (2022) 3 - p. 281-290 , 2022
Link:
https://doi.org/10.1007/s12541-022-00619-0
RT Journal T1 <Title>Design and Positioning Control of a Flexure-Based Nano-positioning Stage Driven by Halbach Array Voice Coil Actuator</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s12541-022-00619-0&Exemplar=1&LAN=DE A1 Zhang, Chi A1 Huang, Xiaolu A1 Yang, Miao A1 Chen, Si-Lu A1 Chen, Jinhua A1 Yang, Guilin PB Springer Science and Business Media LLC YR 2022 SN 2234-7593 SN 2005-4602 JF International Journal of Precision Engineering and Manufacturing VO 23 IS 3 SP 281 OP 290 LK http://dx.doi.org/https://doi.org/10.1007/s12541-022-00619-0 DO https://doi.org/10.1007/s12541-022-00619-0 SF ELIB - SuUB Bremen
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