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1 Ergebnisse
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Achievement of Green and Sustainable CVD Through Process, E..:
Baek, Song Yi
;
Park, Jingyu
;
Koh, Taeyoung
...
International Journal of Precision Engineering and Manufacturing-Green Technology. 11 (2024) 4 - p. 1295-1316 , 2024
Link:
https://doi.org/10.1007/s40684-024-00606-y
RT Journal T1 <Title>Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_s40684-024-00606-y&Exemplar=1&LAN=DE A1 Baek, Song Yi A1 Park, Jingyu A1 Koh, Taeyoung A1 Kim, Dohyung A1 Woo, Jewoung A1 Jung, Jinwoo A1 Park, Se Jun A1 Lee, Changsoo A1 Choi, Chulhwan PB Springer Science and Business Media LLC YR 2024 SN 2288-6206 SN 2198-0810 JF International Journal of Precision Engineering and Manufacturing-Green Technology VO 11 IS 4 SP 1295 OP 1316 LK http://dx.doi.org/https://doi.org/10.1007/s40684-024-00606-y DO https://doi.org/10.1007/s40684-024-00606-y SF ELIB - SuUB Bremen
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