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1 Ergebnisse
1
A new, fully integrated, E-beam tester:
Hall, DJ
;
Sloman, AW
;
Plows, GS
Microelectronic Engineering. 12 (1990) 1-4 - p. 57-63 , 1990
Link:
https://doi.org/10.1016/0167-9317(90)90015-l
RT Journal T1 <Title>A new, fully integrated, E-beam tester</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_0167-9317(90)90015-l&Exemplar=1&LAN=DE A1 Hall, DJ A1 Sloman, AW A1 Plows, GS PB Elsevier BV YR 1990 SN 0167-9317 JF Microelectronic Engineering VO 12 IS 1-4 SP 57 OP 63 LK http://dx.doi.org/https://doi.org/10.1016/0167-9317(90)90015-l DO https://doi.org/10.1016/0167-9317(90)90015-l SF ELIB - SuUB Bremen
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