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1 Ergebnisse
1
Oxidation of GeSi:
Nicolet, Marc-A.
;
Liu, Wen-Shu
Microelectronic Engineering. 28 (1995) 1-4 - p. 185-191 , 1995
Link:
https://doi.org/10.1016/0167-9317(95)00040-f
RT Journal T1 <Title>Oxidation of GeSi</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_0167-9317(95)00040-f&Exemplar=1&LAN=DE A1 Nicolet, Marc-A. A1 Liu, Wen-Shu PB Elsevier BV YR 1995 SN 0167-9317 JF Microelectronic Engineering VO 28 IS 1-4 SP 185 OP 191 LK http://dx.doi.org/https://doi.org/10.1016/0167-9317(95)00040-f DO https://doi.org/10.1016/0167-9317(95)00040-f SF ELIB - SuUB Bremen
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