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Characteristics of Al maskless patterning using focused ion..:

Kenji Gamo ; Ge Huang ; Kouichi Moriizumi...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  7-8 (1985)  - p. 864-868 , 1985
Link: https://doi.org/10.1016/0168-583x(85)90484-7