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The use of four-point probe sheet resistance measurements f..:

Smith, Alan K. ; Perloff, David S. ; Edwards, Rob..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  6 (1985)  1-2 - p. 382-388 , 1985
Link: https://doi.org/10.1016/0168-583x(85)90661-5