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Laser sputtering:

Kelly, Roger ; Cuomo, J.J. ; Leary, P.A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  9 (1985)  3 - p. 329-340 , 1985
Link: https://doi.org/10.1016/0168-583x(85)90760-8