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Mixing and chemical effects in SIMS depth profiling the Si/..:

Anderle, M. ; Loxton, C.M.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  15 (1986)  1-6 - p. 186-188 , 1986
Link: https://doi.org/10.1016/0168-583x(86)90281-8