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A computer program for the analysis of RBS spectra:

Wen-Zhi Li ; Zaki Al-Tamimi
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  15 (1986)  1-6 - p. 241-246 , 1986
Link: https://doi.org/10.1016/0168-583x(86)90294-6