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A 600 keV research heavy ion implanter:

Jiang, Xin Yuan ; Lu Shi Wan ; Shi Zhi Zu
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  21 (1987)  1-4 - p. 310-313 , 1987
Link: https://doi.org/10.1016/0168-583x(87)90847-0