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Optimization of the ion implantation process:

Maczka, D. ; Latuszynski, A. ; Kuduk, R..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  21 (1987)  1-4 - p. 521-522 , 1987
Link: https://doi.org/10.1016/0168-583x(87)90895-0