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Thermal-wave measurements of ion implanted silicon:

Kirby, Bradford J. ; Larson, Lawrence A. ; Liang, Ru-Yu
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  21 (1987)  1-4 - p. 550-553 , 1987
Link: https://doi.org/10.1016/0168-583x(87)90901-3