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Ion beam deposition in materials research:

Zuhr, R.A. ; Pennycook, S.J. ; Noggle, T.S....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  37-38 (1989)  - p. 16-21 , 1989
Link: https://doi.org/10.1016/0168-583x(89)90129-8