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Nondestructive assessment of SIMOX substrates:

Steigmeier, E.F. ; Harbeke, G. ; Reeson, K.J...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  37-38 (1989)  - p. 304-307 , 1989
Link: https://doi.org/10.1016/0168-583x(89)90191-2