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Influence of structure process flow and high current implan..:

Ploss, R. ; Harley-Stead, M. ; Weisshuhn, S...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  36 (1989)  4 - p. 439-445 , 1989
Link: https://doi.org/10.1016/0168-583x(89)90347-9