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Electric potential distribution effects in dc diode sputter..:

Czekaj, D. ; Hollmann, E.K. ; Kozirev, A.B...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  36 (1989)  3 - p. 316-318 , 1989
Link: https://doi.org/10.1016/0168-583x(89)90674-5