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Processes in implanted silicon stimulated by silicidation r..:

Gerasimenko, N.N. ; Vasiljev, S.V. ; Kalinin, V.V.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  39 (1989)  1-4 - p. 259-267 , 1989
Link: https://doi.org/10.1016/0168-583x(89)90783-0