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Study of modification processes in sputtering during oxygen..:

Saidoh, Masahiro ; Yamada, Reiji
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  39 (1989)  1-4 - p. 599-602 , 1989
Link: https://doi.org/10.1016/0168-583x(89)90856-2