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Recent advance of focused ion beam technology in maskless d..:

Kenji, Gamo ; Susumu, Namba
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  59-60 (1991)  - p. 190-196 , 1991
Link: https://doi.org/10.1016/0168-583x(91)95203-p