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Ion-beam-assisted deposition of Al films with strong prefer..:

Susumu, Masaki ; Hiroshi, Kobayashi ; Hiroshi, Morisaki
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  59-60 (1991)  - p. 292-296 , 1991
Link: https://doi.org/10.1016/0168-583x(91)95226-4