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Peculiarities of buried silicon oxynitride layer synthesis ..:

Danilin, A.B. ; Drakin, K.A. ; Kukin, V.V....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  58 (1991)  2 - p. 191-193 , 1991
Link: https://doi.org/10.1016/0168-583x(91)95586-3