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Tribological properties of carbonized photoresist:

Öchsner, R. ; Kluge, A. ; Frey, L..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  59-60 (1991)  - p. 793-797 , 1991
Link: https://doi.org/10.1016/0168-583x(91)95706-j