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Defect studies on nonstoichiometric TiN by THDS:

Hoondert, Wilbert H.B. ; Buters, Wim Th.M. ; Thijsse, Barend J..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  59-60 (1991)  - p. 1340-1344 , 1991
Link: https://doi.org/10.1016/0168-583x(91)95826-y