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Oxygen ion etching of YBa2Cu3O7−y:

Yoshitake, Nishi ; Yasuo, Takahashi ; Seiichiro, Takagi..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  59-60 (1991)  - p. 1415-1417 , 1991
Link: https://doi.org/10.1016/0168-583x(91)95843-3