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Control of wafer charging on the Varian EXTRION 1000 ion im..:

Satoh, Shu ; Pedersen, Bjorn O. ; Downey, Daniel F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  55 (1991)  1-4 - p. 77-81 , 1991
Link: https://doi.org/10.1016/0168-583x(91)96139-c