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A dual ion beam epitaxy system:

Shijun, Su ; Weisheng, Jiang ; Fuguang, Qin.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  70 (1992)  1-4 - p. 579-582 , 1992
Link: https://doi.org/10.1016/0168-583x(92)95986-2