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Progress in wafer charging and charge neutralization:

Mack, M.E. ; Barschall, P. ; Corey, P...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  74 (1993)  1-2 - p. 287-290 , 1993
Link: https://doi.org/10.1016/0168-583x(93)95062-a