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Hydrogen depth profiling of SiNx films by the detection of ..:

Huan, Niu ; Shiu-Chin, Wu ; Sheng-Liang, Huang..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  79 (1993)  1-4 - p. 536-538 , 1993
Link: https://doi.org/10.1016/0168-583x(93)95408-w