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Surface charge control during high-current ion implantation..:

Current, Michael I ; Lukaszek, Wes ; Vella, Michael C.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  96 (1995)  1-2 - p. 34-38 , 1995
Link: https://doi.org/10.1016/0168-583x(94)00449-8