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Fabrication of bifocal microlenses on InP and Si by Ar ion ..:

Congxin, Ren ; Deyuan, Xiao ; Guoliang, Chen..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  96 (1995)  1-2 - p. 401-404 , 1995
Link: https://doi.org/10.1016/0168-583x(94)00528-1