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High current ion implantation by plasma immersion technique:

Thomae, R.W. ; Seiler, B. ; Bender, H....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  99 (1995)  1-4 - p. 569-572 , 1995
Link: https://doi.org/10.1016/0168-583x(95)00228-6