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Ion implantation doping and electrical conductivity enhance..:

Cui, Yunlong ; Lin, Senhao ; Rong, Tingwen..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  100 (1995)  4 - p. 502-504 , 1995
Link: https://doi.org/10.1016/0168-583x(95)00477-7