I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

An investigation of dopant gases in plasma immersion ion im..:

Qin, Shu ; Bernstein, James D. ; Zhao, Zhuofan...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  106 (1995)  1-4 - p. 636-640 , 1995
Link: https://doi.org/10.1016/0168-583x(95)00779-2