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Low energy ion beam irradiation of silicon:

Nebiker, P.W. ; Döbeli, M. ; Mühle, R...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  113 (1996)  1-4 - p. 205-208 , 1996
Link: https://doi.org/10.1016/0168-583x(95)01366-0