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Low dose Ar+ ion implantation effects on the properties of ..:

Patil, S.I. ; Shreekala, R. ; Lanke, U...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  114 (1996)  1-2 - p. 42-45 , 1996
Link: https://doi.org/10.1016/0168-583x(95)01583-3